Please use this identifier to cite or link to this item: https://repositorio.fei.edu.br/handle/FEI/1295
Title: Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Authors: BÜHLER, R.
Simoen, E.
COLLAERT, N.
THEAN, A.
ENEMAN, G.
FAVIA, P.
BENDER, H.
VINCENT, B.
HIKAVYY, A.
LOO, R.
MARTINO, J. A.
CLAEYS, C.
Issue Date: 2014
Journal: Physica Status Solidi. C, Current Topics in Solid State Physics (Print)
ISSN: 1862-6351
Citation: BÜHLER, R.; Simoen, E.; COLLAERT, N.; THEAN, A.; ENEMAN, G.; FAVIA, P.; BENDER, H.; VINCENT, B.; HIKAVYY, A.; LOO, R.; MARTINO, J. A.; CLAEYS, C.. Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors. Physica Status Solidi. C, Current Topics in Solid State Physics (Print), v. 11, n. 11-12, p. 1578-1582, 2014.
Access Type: Acesso Restrito
DOI: 10.1002/pssc.201400021
URI: https://repositorio.fei.edu.br/handle/FEI/1295
Appears in Collections:Artigos

Files in This Item:
There are no files associated with this item.


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.