Please use this identifier to cite or link to this item: https://repositorio.fei.edu.br/handle/FEI/1615
Title: Crystallographic and morphological properties of magnetron sputtered Ti and Zr thin films
Authors: CHINAGLIA, ELIANE F.
OPPENHEIM, IVETTE C.
Issue Date: 2001
Journal: MRS Proceedings
ISSN: 1946-4274
Citation: CHINAGLIA, ELIANE F.; OPPENHEIM, IVETTE C.. Crystallographic and morphological properties of magnetron sputtered Ti and Zr thin films. MRS Proceedings, v. 672, p. O3.26, 2001.
Access Type: Acesso Aberto
DOI: 10.1557/PROC-671-O3.26
URI: https://repositorio.fei.edu.br/handle/FEI/1615
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