A new series resistance extraction method for junctionless nanowire transistors

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2016-11-02
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TREVISOLI, R.
Rodrido Doria
Michelly De Souza
BARRAUD, S.
VINET, M.
Marcelo Antonio Pavanello
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SBMicro 2016 - 31st Symposium on Microelectronics Technology and Devices: Chip on the Mountains, co-located 29th SBCCI - Circuits and Systems Design, 6th WCAS - IC Design Cases, 1st INSCIT - Electronic Instrumentation and 16th SForum - Undergraduate-Student Forum
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TREVISOLI, R.; DORIA, R.; DE SOUZA, M.; BARRAUD, S.; VINET, M.; PAVANELLO, M. A. A new series resistance extraction method for junctionless nanowire transistors. SBMicro 2016 - 31st Symposium on Microelectronics Technology and Devices: Chip on the Mountains, co-located 29th SBCCI - Circuits and Systems Design, 6th WCAS - IC Design Cases, 1st INSCIT - Electronic Instrumentation and 16th SForum - Undergraduate-Student Forum, Nov, 2016.
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Series resistance can severely affect the electrical behavior of such Junctionless Nanowire Transistors. The aim of this work is to propose a new method for the extraction of the series resistance in Junctionless Nanowire Transistors. The method is validated by means of tridimensional numerical simulations and experimental results, using transistors with different widths and doping concentrations.

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