Open model for external mechanical stress of semiconductors and MEMS
dc.contributor.author | BÜHLER, Rudolf Theoderich | |
dc.contributor.author | Renato Giacomini | |
dc.contributor.authorOrcid | https://orcid.org/0000-0003-1060-2649 | |
dc.contributor.authorOrcid | https://orcid.org/0000-0002-7934-9605 | |
dc.date.accessioned | 2022-01-12T21:57:21Z | |
dc.date.available | 2022-01-12T21:57:21Z | |
dc.date.issued | 2018-03-22 | |
dc.description.abstract | © 2018 IEEE.This paper defines the details of the bending equipment solution and the calibration required for characterization of external mechanical stress in semiconductors and MEMS. The equipment is suited for use in probe station for electrical characterization of devices under controlled external mechanical stress. | |
dc.description.firstpage | 189 | |
dc.description.lastpage | 193 | |
dc.description.volume | 2018-March | |
dc.identifier.citation | BÜHLER, R. T.; GIACOMINI, R. Open model for external mechanical stress of semiconductors and MEMS.IEEE International Conference on Microelectronic Test Structures, p. 189-193, March, 2018. | |
dc.identifier.doi | 10.1109/ICMTS.2018.8383795 | |
dc.identifier.uri | https://repositorio.fei.edu.br/handle/FEI/3787 | |
dc.relation.ispartof | IEEE International Conference on Microelectronic Test Structures | |
dc.rights | Acesso Restrito | |
dc.subject.otherlanguage | external mechanical stress | |
dc.subject.otherlanguage | MEMS | |
dc.subject.otherlanguage | semiconductor | |
dc.title | Open model for external mechanical stress of semiconductors and MEMS | |
dc.type | Artigo de evento | |
fei.scopus.citations | 0 | |
fei.scopus.eid | 2-s2.0-85049234259 | |
fei.scopus.subject | Electrical characterization | |
fei.scopus.subject | Mechanical stress | |
fei.scopus.subject | Probe stations | |
fei.scopus.updated | 2024-07-01 | |
fei.scopus.url | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85049234259&origin=inward |