Microstructure development of HfOx thin films

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dc.contributor.authorCHINAGLIA, ELIANE F.
dc.contributor.authorAVANCI, LUIS H.
dc.date.accessioned2019-08-19T23:47:32Z
dc.date.available2019-08-19T23:47:32Z
dc.date.issued2015
dc.description.firstpagemrss15-2135818
dc.description.volume1805
dc.identifier.citationCHINAGLIA, ELIANE F.; AVANCI, LUIS H.. Microstructure development of HfOx thin films. MRS Proceedings, v. 1805, p. mrss15-2135818, 2015.
dc.identifier.doi10.1557/opl.2015.834
dc.identifier.issn1946-4274
dc.identifier.urihttps://repositorio.fei.edu.br/handle/FEI/1614
dc.relation.ispartofMRS Proceedings
dc.rightsAcesso Aberto
dc.titleMicrostructure development of HfOx thin filmspt_BR
dc.typeArtigopt_BR
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