Influence of the N-type FinFET width on the zero temperature coefficient

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2007-09-07
Autores
BELLODI, M.
MARTINO, J. A.
CAMILO, L. M.
SIMOEN, E.
CLAEYS, C.
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ECS Transactions
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BELLODI, M.; MARTINO, J. A.; CAMILO, L. M.; SIMOEN, E..; CLAEYS, C. Influence of the N-type FinFET width on the zero temperature coefficient. ECS Transactions, v. 9, n. 1, p. 29-36, Sept. 2007.
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This paper presents the influence of the Fin width dimension on the Zero Temperature Coefficient (ZTC) behavior for devices operating at high temperatures (from room temperature up to 573K). Besides this, a simple analytical model is presented in order to describe the ZTC behavior as the temperature increases. Three-dimensional simulations are carried out and compared with experimental results to support the interpretation presented along this work. © The Electrochemical Society.

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