Fin width influence on uniaxial stress of triple-gate SOI nMOSFETs

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dc.contributor.authorBÜHLER, Rudolf Theoderich
dc.contributor.authorMARTINO, J. A.
dc.contributor.authorAGOPIAN, P. G. D.
dc.contributor.authorRenato Giacomini
dc.contributor.authorOrcidhttps://orcid.org/0000-0002-7934-9605
dc.contributor.authorOrcidhttps://orcid.org/0000-0003-1060-2649
dc.date.accessioned2022-01-12T22:02:33Z
dc.date.available2022-01-12T22:02:33Z
dc.date.issued2012-03-17
dc.description.abstractThis work analyzes the fin width dependence on induced uniaxial stress on n-type MuGFETs thought 3D simulations. A study on the stress distribution and the electric characterization of the device to measure the impact on its performance is accomplished. The stress distribution and the device performance exhibited dependence on the fin width, with higher stress transfer for narrower fins resulting in better electrical performance. © 2012 IEEE.
dc.identifier.citationBÜHLER, R. T.; MARTINO, J. A.; AGOPIAN, P. G. D.; GIACOMINI, R. Fin width influence on uniaxial stress of triple-gate SOI nMOSFETs. 2012 8th International Caribbean Conference on Devices, Circuits and Systems, ICCDCS 2012, Marh, 2012.
dc.identifier.doi10.1109/ICCDCS.2012.6188901
dc.identifier.urihttps://repositorio.fei.edu.br/handle/FEI/4143
dc.relation.ispartof2012 8th International Caribbean Conference on Devices, Circuits and Systems, ICCDCS 2012
dc.rightsAcesso Restrito
dc.subject.otherlanguagefin width
dc.subject.otherlanguageSOI MuGFET
dc.subject.otherlanguageUniaxial Stress Profiles
dc.titleFin width influence on uniaxial stress of triple-gate SOI nMOSFETs
dc.typeArtigo de evento
fei.scopus.citations1
fei.scopus.eid2-s2.0-84860994709
fei.scopus.subject3D simulations
fei.scopus.subjectDevice performance
fei.scopus.subjectElectric characterization
fei.scopus.subjectElectrical performance
fei.scopus.subjectFin widths
fei.scopus.subjectSOI MuGFET
fei.scopus.subjectSOI n-MOSFETs
fei.scopus.subjectStress transfer
fei.scopus.subjectTriple-gate
fei.scopus.subjectUniaxial stress
fei.scopus.updated2024-07-01
fei.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84860994709&origin=inward
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