ZILIOTTO, A. P. B.BELLODI, M.2022-01-122022-01-122011-10-05ZILIOTTO, A. P. B.; BELLODI, M. Evaluation of the high temperatures influence on high frequency C-V curves of MOS capacitor. ECS Transactions, v. 41, n. 6, p. 163-173, 2011.1938-5862https://repositorio.fei.edu.br/handle/FEI/4184It is presented numerical bi-dimensional simulations results concerning the high frequency capacitance versus voltage (C-V) characteristic of the MOS capacitor operating from room temperature up to 573K using AC analysis. The results show that the C-V curves behavior is influenced by substrate doping concentration, substrate and gate materials. Also, it is presented experimental results concerning to the high frequency C-V characteristic of a sample MOS capacitor, confirming the results obtained through simulations. ©The Electrochemical Society.Acesso RestritoArtigo de evento10.1149/1.3629964