Microstructure development of HfOx thin films

CHINAGLIA, ELIANE F.AVANCI, LUIS H.2019-08-192019-08-192015CHINAGLIA, ELIANE F.; AVANCI, LUIS H.. Microstructure development of HfOx thin films. MRS Proceedings, v. 1805, p. mrss15-2135818, 2015.1946-4274https://repositorio.fei.edu.br/handle/FEI/1614Acesso AbertoMicrostructure development of HfOx thin filmsArtigo10.1557/opl.2015.834