RUE, B.Michelly De SouzaMarcelo Antonio PavanelloFLANDRE, D.2023-08-262023-08-262009-09-13RUE, B.; DE SOUZA, M.; PAVANELLO, M. A.; FLANDRE, D. SOI PIN diodes for temperature sensing in harsh environment. Proceedings - 2009 IMAPS International Conference on High Temperature Electronics Network, HiTEN 2009, p. 64-69, sept. 2009.https://repositorio.fei.edu.br/handle/FEI/5007We study the use of lateral SOI PIN diodes as thermometers in a large range of temperature from 100 K to 575 K and under radiations. These diodes indeed show very linear voltage vs temperature characteristics when biased with a constant current and can be successfully used in an integrated temperature sensor. The diodes are implemented in three SOI technologies: UCL 2μm process, Xfab1μm and OKI 0.15μm industrial processes. The OKI diode characteristics after neutron irradiation are also discussed.Acesso RestritoArtigo de eventoHigh temperatureIrradiationLow temperatureSOI PIN diodeTemperature sensor