Michelly De SouzaRUE, B.FLANDRE, D.Marcelo Antonio Pavanello2022-01-122022-01-122009-09-03DE DOUZA, M. RUE, B.; FLANDRE, D.; PAVANELLO, M. A. On the performance of thin-film lateral SOI PIN diodes as thermal sensors in a wide temperature range. ECS Transactions, v. 23, n. 1, p. 397-404, Sept. 2009.1938-5862https://repositorio.fei.edu.br/handle/FEI/4277This paper presents a study of lateral SOI PIN diodes as temperature sensors in the range of 100 K to 400 K. Experimental results indicate that PIN diodes can be used to implement temperature sensors with high accuracy in cryogenic regime, provided that a suitable temperature range is chosen. Numerical simulations using Atlas two-dimensional simulator were performed in order to confirm this hypothesis and extend this analysis, verifying the accuracy of the existing model. © The Electrochemical Society.Acesso RestritoArtigo de evento10.1149/1.3183744