Optimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers

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dc.contributor.authorBECCARO, W.
dc.contributor.authorRAMOS, C. A. S.
dc.contributor.authorDUARTE, S. X.
dc.date.accessioned2022-08-01T06:02:47Z
dc.date.available2022-08-01T06:02:47Z
dc.date.issued2022-01-05
dc.description.abstract© 2022, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature.High-temperature open tube furnaces are essential in semiconductor manufacturing process. This type of equipment requires periodic servicing for operational longevity and to comply with the requirements of microelectronics processes. This paper presents a comparative analysis of Proportional–Integral (PI) and Fuzzy-PI algorithms for controlling a three-zone open tube furnace. Initially, the furnace was identified using an AutoRegressive eXogenous (ARX) model. The model was tested using a cross-validation method with 10-steps-ahead prediction tests. The prediction showed results higher than 93.70% with Final Prediction Error (FPE) lower than 0.0007. The controllers were simulated and their parameters were tuned using the identified model. The tuned algorithms were implemented through a PC-based instrumentation in real-time. The Fuzzy-PI controller presented the best results regarding the steady-state error, controlling the temperature of the furnace with a variation less than ±1.06∘C in the flat zone at the process temperature of 900∘C with fast settling time. This innovative result presents a major step toward the modernization of high-temperature furnaces to meet the growing demands in the electronics industry.
dc.identifier.citationBECCARO, W.; RAMOS, C. A. S.; DUARTE, S. X. Optimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers. Journal of Intelligent Manufacturing. 2022.
dc.identifier.doi10.1007/s10845-022-01993-2
dc.identifier.issn1572-8145
dc.identifier.urihttps://repositorio.fei.edu.br/handle/FEI/4540
dc.relation.ispartofJournal of Intelligent Manufacturing
dc.rightsAcesso Restrito
dc.subject.otherlanguageFuzzy logic controller
dc.subject.otherlanguageIntelligent manufacturing
dc.subject.otherlanguagePID
dc.subject.otherlanguageProcess control
dc.subject.otherlanguageSemiconductor manufacturing
dc.subject.otherlanguageTemperature control
dc.titleOptimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers
dc.typeArtigo
fei.scopus.citations3
fei.scopus.eid2-s2.0-85134838284
fei.scopus.subjectComparative analyzes
fei.scopus.subjectFurnace performance
fei.scopus.subjectFuzzy logic controllers
fei.scopus.subjectFuzzy-proportional-integral controllers
fei.scopus.subjectIntelligent Manufacturing
fei.scopus.subjectPID
fei.scopus.subjectProportional integral
fei.scopus.subjectSemiconductor manufacturing
fei.scopus.subjectSemiconductor processing
fei.scopus.subjectTube furnaces
fei.scopus.updated2024-07-01
fei.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85134838284&origin=inward
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