Strain effectiveness dependence on fin dimensions and shape for n-type triple-gate MuGFETs

Página do item simplificado
dc.contributor.authorBÜHLER, Rudolf Theoderich
dc.contributor.authorRenato Giacomini
dc.contributor.authorAGOPIAN, P. G. D.
dc.contributor.authorMARTINO, J. A.
dc.contributor.authorOrcidhttps://orcid.org/0000-0002-7934-9605
dc.contributor.authorOrcidhttps://orcid.org/0000-0003-1060-2649
dc.date.accessioned2022-01-12T22:03:15Z
dc.date.available2022-01-12T22:03:15Z
dc.date.issued2011-09-02
dc.description.abstractWe analyze in this work, for the first time, the effectiveness and the dependence of the induced uniaxial stress on process variables, using the CESL technique on n-type MuGFETs thought 3D simulations. The fin cross-section shape variation is also included with a complete study on the stress distribution and the electric characterization of the device to measure the impact on its performance. The stress distribution and the device performance exhibited dependence with the shape and fin dimensions, with longer and taller inverse trapezium fin possessing better stress and DC characteristics, and better AC performance on the regular trapezium. ©The Electrochemical Society.
dc.description.firstpage207
dc.description.issuenumber1
dc.description.lastpage214
dc.description.volume39
dc.identifier.citationBÜHLER, R. T.; GIACOMONI, R.; AGOPIAN, P. G. D.; MARTINO, J. A. Strain effectiveness dependence on fin dimensions and shape for n-type triple-gate MuGFETs. ECS Transactions, v. 39, n. 1, p. 207-214, September, 2011.
dc.identifier.doi10.1149/1.3615195
dc.identifier.issn1938-5862
dc.identifier.urihttps://repositorio.fei.edu.br/handle/FEI/4191
dc.relation.ispartofECS Transactions
dc.rightsAcesso Restrito
dc.titleStrain effectiveness dependence on fin dimensions and shape for n-type triple-gate MuGFETs
dc.typeArtigo de evento
fei.scopus.citations0
fei.scopus.eid2-s2.0-84856874729
fei.scopus.subject3D simulations
fei.scopus.subjectAC performance
fei.scopus.subjectDC characteristics
fei.scopus.subjectDevice performance
fei.scopus.subjectElectric characterization
fei.scopus.subjectFin dimensions
fei.scopus.subjectProcess Variables
fei.scopus.subjectShape variations
fei.scopus.subjectTriple-gate
fei.scopus.subjectUniaxial stress
fei.scopus.updated2024-07-01
fei.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84856874729&origin=inward
Arquivos
Coleções
Artigos