Gate misalignment evaluation method for commercial MOS trapezoidal gate transistors

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dc.contributor.authorSABBADIN, D. S.
dc.contributor.authorRenato Giacomini
dc.contributor.authorOrcidhttps://orcid.org/0000-0003-1060-2649
dc.date.accessioned2022-01-12T22:00:48Z
dc.date.available2022-01-12T22:00:48Z
dc.date.issued2014-04-04
dc.description.abstract© 2014 IEEE.This work addresses the effect of gate misalignment on the electrical characteristics of MOSFET structures with trapezoidal gate shapes. Differential Triangular test structure are used for the extraction of misalignments between gate and the other transistor structures, as a function of the differences in drain currents. Three-dimensional numerical simulation was used for comparison and verification of measurements. These simulations and measurements show how the analytical model developed fits properly to designed structures.
dc.identifier.citationSABBADIN, D. S.; GIACOMONI, R. Gate misalignment evaluation method for commercial MOS trapezoidal gate transistors. 2014 International Caribbean Conference on Devices, Circuits and Systems, ICCDCS 2014 - Conference Proceedings, Apr. 2014.
dc.identifier.doi10.1109/ICCDCS.2014.7016172
dc.identifier.urihttps://repositorio.fei.edu.br/handle/FEI/4025
dc.relation.ispartof2014 International Caribbean Conference on Devices, Circuits and Systems, ICCDCS 2014 - Conference Proceedings
dc.rightsAcesso Restrito
dc.subject.otherlanguageGate Misalignment
dc.subject.otherlanguageTrapezoidal Gate
dc.titleGate misalignment evaluation method for commercial MOS trapezoidal gate transistors
dc.typeArtigo de evento
fei.scopus.citations0
fei.scopus.eid2-s2.0-84946686160
fei.scopus.subjectElectrical characteristic
fei.scopus.subjectGate misalignment
fei.scopus.subjectGate transistors
fei.scopus.subjectMOSFET structures
fei.scopus.subjectSimulations and measurements
fei.scopus.subjectThree-dimensional numerical simulations
fei.scopus.subjectTransistor structure
fei.scopus.subjectTrapezoidal Gate
fei.scopus.updated2024-07-01
fei.scopus.urlhttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84946686160&origin=inward
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