On the performance of thin-film lateral SOI PIN diodes as thermal sensors in a wide temperature range

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2009-09-03
Autores
Michelly De Souza
RUE, B.
FLANDRE, D.
Marcelo Antonio Pavanello
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ECS Transactions
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DE DOUZA, M. RUE, B.; FLANDRE, D.; PAVANELLO, M. A. On the performance of thin-film lateral SOI PIN diodes as thermal sensors in a wide temperature range. ECS Transactions, v. 23, n. 1, p. 397-404, Sept. 2009.
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This paper presents a study of lateral SOI PIN diodes as temperature sensors in the range of 100 K to 400 K. Experimental results indicate that PIN diodes can be used to implement temperature sensors with high accuracy in cryogenic regime, provided that a suitable temperature range is chosen. Numerical simulations using Atlas two-dimensional simulator were performed in order to confirm this hypothesis and extend this analysis, verifying the accuracy of the existing model. © The Electrochemical Society.

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