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Experimental Demonstration of Ω-Gate SOI Nanowire MOS Transistors' Mobility Variation Induced by Substrate Bias

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Tipo de produção

Artigo

Data de publicação

2022

Texto completo (DOI)

Periódico

IEEE Transactions on Electron Devices

Editor

Citações na Scopus

0

Autores

BERMAMASCHI, F. E.
RIBEIRO, T. A.
PAZ, B. C.
Michelly De Souza
BARRAUD, S.
CASSE, M.
VINET, M.
FAYNOT, O.
Marcelo Antonio Pavanello

Orientadores

Resumo

© 1963-2012 IEEE.This work investigates the carrier mobility variation in Ω-gate silicon-on-insulator (SOI) nanowire MOS transistors induced by substrate (or back) biasing. The analysis is carried out through experimental measurements and 3-D TCAD simulation, performed in n-type devices with variable fin width. Mobility enhancement is observed for lower back bias levels, due to the initial conduction through the Si-BOX interface, which presents higher mobility, prior to the activation of the front channel. As back bias is increased, however, the strong substrate-induced electric field in the back channel (BC) is responsible for worsening scattering mechanisms in the BC, such as surface roughness and acoustic phonon scattering, inducing mobility degradation. The effect is amplified as the fin width increases. For short-channel devices, the use of back bias was more beneficial for mobility due to a stronger mobility enhancement and lower mobility degradation.

Citação

BERMAMASCHI, F. E.; RIBEIRO, T. A.; PAZ, B. C.; DE SOUZA, M.; BARRAUD, S.; CASSE, M.; VINET, M.; FAYNOT, O.; PAVANELLO, M. A. Experimental demonstration of ω-gate soi nanowire mos transistors' mobility variation induced by substrate bias. IEEE Transactions on Electron Devices, v. 69, n. 7, march, 2022.

Palavras-chave

Keywords

Carrier mobility; nanowire MOS transistor; substrate bias

Assuntos Scopus

Back bias; Fin widths; Mobility enhancement; Mobility variation; MOS-FET; MOSFETs; Nanowire MOS transistor; Silicon on insulator; Substrate bias; Substrate bias.

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